MEMS are tiny mechanical structures etched in silicon alongside electronics. MEMS gyroscopes and accelerometers sense motion through the movement of microscopic vibrating or suspended masses. They are small, light, low-power and rugged, which makes them the usual choice for IMUs, AHRS and INS on vehicles, drones and robots.
Where it is used
- IMUs
- AHRS
- Tilt sensors
- INS for UAVs and robots